Electron Beam Lithography Contributions from Jena Kunsthandwerk; Malerei; Grafische Verfahren Geburtstag 2018 des großen und
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Electron Beam Lithography Contributions from Jena Kunsthandwerk; Malerei; Grafische Verfahren Geburtstag 2018 des großen undElectron beam litography can look back upon a successful develpment in Jena. After the year 1990, the competitive conditions have stiffened. on the other hand, it has become much easier to participate in international conferences exhibitions and to promote a worldwide exchange of ideas and views. Numerous innovations contributed to the technical and commercial attractiveness of the Jena tools (originally introduced tothe market under the names ZBA31
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